用溶胶-凝胶法在Pt/Ti/SiO2/Si(001)基片上制备了BiFe0.95Mn0.05O3/Pb(Zr0.4Ti0.6)O3/BiFe0.95Mn0.05O3(BFMO/PZT/BFMO) 集成薄膜,采用X射线衍射仪分析了其物相结构;采用铁电测试仪考察了该集成薄膜与铂极构成的铁电电容器的性能.结果表明:该集成薄膜结晶较好,除BFMO、PZT及基片的衍射峰外没有其它衍射峰存在;当电场强度为0.7 MV·cm-1时,Pt/BFMO/PZT/BFMO/Pt电容器的电滞回线对称性良好,剩余极化强度为17.9 μC·cm-2,矫顽力为0.12 MV·cm-1;在电场强度为0.4 MV·cm-1下测得的铁电电容器漏电流密度为2×10-5 A·cm-2,电容器在经过1010次反转后未出现明显的疲劳现象.
所属栏目
新材料 新工艺国家“973”计划前期研究专项(2007CB616910);国家自然科学基金资助项目(60876055);高等学校博士点基金资助项目(20091301110002);河北省自然科学基金资助项目(E2008000620,E2009000207);河北省应用基础研究计划重点基础研究项目(08965124D)
收稿日期
2009/5/282010/2/4
作者单位
马闻良:河北大学物理科学与技术学院, 保定 071002
刘保亭:河北大学物理科学与技术学院, 保定 071002
王宽冒:河北大学物理科学与技术学院, 保定 071002
边芳:河北大学物理科学与技术学院, 保定 071002
李晓红:河北大学物理科学与技术学院, 保定 071002
赵庆勋:河北大学物理科学与技术学院, 保定 071002
备注
马闻良(1980-),男,河北保定人,硕士研究生.
引用该论文:
MA Wen-liang,LIU Bao-ting,WANG Kuan-mao,BIAN Fang,LI Xiao-hong,ZHAO Qing-xun.Structure of Si-Base BiFe0.95Mn0.05O3/Pb(Zr0.4Ti0.6)O3/BiFe0.95Mn0.05O3 Integrated Thin Film and Its Platinum Electrode Capacitor Properties[J].Materials for mechancial engineering,2010,34(4):42～46
马闻良,刘保亭,王宽冒,边芳,李晓红,赵庆勋.硅基BiFe0.95Mn0.05O3/Pb(Zr0.4Ti0.6)O3/BiFe0.95Mn0.05O3集成薄膜的结构及其铂电极电容器的性能[J].机械工程材料,2010,34(4):42～46
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